Engineer Process

Objective

A process engineer position for advanced thin film process development

Qualifications

-Eleven years of direct experience in Thin Film Deposition (CVD & PVD); familiar with various thin film process techniques, such as CMP, lithography, etch, clean tech.

-Strong technical skills in developing & analyzing manufacturing processes and their relationship with product performance

-Hands-on laboratory experience in clean room techniques, thin film process and thin film characterization using various equipments

-Self-starter, and always have a positive “can do” attitude

-Strong technical communication and inter-personal skills

-Innovative and inquisitive

Laboratory Skills

Process Equipments:

• Chemical Vapor Deposition (CVD)

• Physical Vapor deposition (PVD)

• Pulsed Laser Deposition (PLD)

• Spin Coating

• Rapid Thermal Annealing (RTA)

Characterization Tools:

• Structure Analysis: FTIR,Raman, XRD

• Morphology analysis: SEM, TEM, AFM, Surface profiler

• Composition Analysis: SIMS, XPS

• Film Stress: Stress Gauge

• Film Thickness & Refractive Index: Ellipsometer

• Sheet Resistance: Four-Point Probe

Analytical Tools & Others:

• Design of Experiments (DOE)

• Statistical Process Control (SPC)

• Problem solving and decisionmaking technique (PSDM)

• Failure mode and effect analysis (FMEA)

Experience

2009~2010 Scientist (R&D), Electrochem Solutions, Raynham, MA

-Advanced battery research and characterization for Li oxyhalide primary battery

2001 ~ 2003 Sr. Engineer (Process Integration) Chartered Semi. Mfg., Singapore

-Work closely with process engineers, operations and test group to develop high performance products

-Monitor in-line process, E-test results, execute Design of experiments (DOEs) to optimize and improve product performance

Major Accomplishments:

-Successfully developed 0.22 and 0.13µm products for volume manufacturing

-Able to meet production schedule and deliver high performance product

-Promoted to Sr. engineer within one year due to excellent achievement

1999 ~ 2001 Research Engineer (R&D, Thin Film) Chartered Semi. Mfg., Singapore

-Work closely with integration team, operation, process engineers, develop high quality, stable thin film process for new product

-Execute Statistical Process Control (SPC) and Design of experiments (DOEs) for process stability control and optimization

-Startup and qualification of process tool

Major Accomplishments:

-Successfully developed thin film processes such as SiN, silicon oxide and SiON, for 0.18µm & 0.13µm products using PECVD, SACVD, HDPCVD.

-Improved yield from 60% to 90% by developing innovative low hydrogen concentration SiN thin film

-Four conference papers were published on VIMIC, DUMIC and MRS.

1997 ~ 1999 Engineer Associate, Chartered Semiconductor Mfg., Singapore

-Develop and Characterize Low k materials for ULSI interconnects

-Five journal papers, one conference paper and one patent were published

Education

2003 ~ 2008 PhD in Material Science and Engineering, Singapore-MIT Alliance, Singapore-Boston, MA

1997 ~ 1999 MS in Physics, National University of Singapore, Singapore

1993 ~ 1997 BS in Physics, Ji Lin University, ChangChun, P.R.China

- Reference Available on Request -

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